MEMS And Microsystems: Design And Manufacture
Book Title: | MEMS And Microsystems: Design And Manufacture |
Author: | Tai-Ran Hsu |
ISBN-13: | 9780070487093 |
Publication: | McGraw Hill Education |
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Overview of MEMS And Microsystems: Design And Manufacture Book
MEMS And Microsystems: Design And Manufacture is a textbook that provides a comprehensive overview of microelectromechanical systems (MEMS) as well as microsystems for engineering students. With numerous diagrams and photographs to illustrate this new technology, the book offers a survey of MEMS and its varied applications in communications, manufacturing, bioengineering, transportation and other areas. It offers an in-depth look into the fundamentals of MEMS technology, which can be useful for manufacturing, electrical, mechanical, aerospace and biomedical engineers.The mechanics, physics and material science foundations of MEMS technology is integrated and this synergy enables readers to understand the basics of microsystems engineering. Strong emphasis is laid on microsystems design, making it useful to meet the needs of students as well as professionals. Packaging aspects are also discussed in the context of MEMS design and manufacture.MEMS And Microsystems: Design And Manufacture was published by Tata McGraw-Hill Education in 2002 and is available as a paperback. Key Features: The textbook caters specifically to students of senior and entry-level graduate courses.Class-tested examples and chapter problems help students understand better.This book covers various electro-mechanical aspects and microfabrication processes of MEMS.
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Engineering
Paperback
English
448 pages
007048709X
19-Aug-02
Textbooks, Engineering for Students and Professionals
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