Overview of Microelectromechanical Systems Book

This book presents an in-depth study of Microelectromechanical system (MEMS) with their applications in the area of microelectronics and microsystems. Different MEMS processing steps such as oxidation, ion implantation, diffusion, chemical vapor deposition, epitaxy and photolithography are thoroughly discussed. An extensive explanation of MEMS actuators and MEMS sensors covers broader area of research and applications that caters to the need of wider domain of readers. The device- and process-level TCAD simulations provide a systematic understanding of device performance before an actual fabrication. Moreover, a detailed study of different MEMS-based systems such as microaccelerometers, micromotors, micropumps, microvalves, microfluidics and RF MEMS addresses the current requirements of MEMS designers.

• Book Type :

EngineeringEntrance

• Book Binding :

Paperback

• Language :

English

• Number of Pages :

• ISBN - 10 :

8131525880

• Microelectromechanical Systems Published On :

1 Dec 2014

• Resource:

Students and Professionals:ExamPreparation, EngineeringEntrance

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