Overview of The Science and Engineering of Microelectronic Fabrication Book

The Science and Engineering of Microelectronic Fabrication, 2/e provides a thorough and accessible introduction to the field of micro fabrication. Revised and expanded in this second edition, the text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, next generation lithography, molecular beam epitaxy and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacture of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The text makes use of the popular process simulation package SUPREM to provide more meaningful examples of the type of real-world dopant redistribution problems that microelectronic fabrication engineers must face. This new edition includes a chapter on micro electro mechanical structures (MEMS), an exciting new area in micro fabrication. The coverage of MEMS includes fundamentals of mechanics, stress in thin films; mechanical to electrical transduction, mechanics of common MEMS devices, bulk micromachining etching techniques, bulk micromachining process flow, surface micromachining basics, surface micromachining process flow, MEMS actuators; and high aspect ratio microsystems technology (HARMST). Power point overheads are available free to adopting professors.

• Book Type :

Science&Mathematics

• Book Binding :

Paperback

• Language :

English

• Number of Pages :

624 pages

• ISBN - 10 :

0198084803

• The Science and Engineering of Microelectronic Fabrication Published On :

17 Apr 2012

• Resource:

Students and Professionals:Textbooks, Science&Mathematics

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